Low Dispersion Integrated Michelson Interferometer on Silicon on Insulator for Optical Coherence Tomography
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چکیده
We present an integrated silicon Michelson interferometer for OCT fabricated with wafer scale deep UV lithography. Silicon waveguides of the interferometer are designed with GVD less than 50 ps/nm.km. The footprint of the device is 0.5 mm x 3 mm. The effect of sidewall roughness of silicon waveguides has been observed, possible solutions are discussed.
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تاریخ انتشار 2011